Numerical simulation of flow field and thin film deposition in PECVD reactor مؤلف البحث Emad Barakat and Joo-Pyo Hong and Seungkyung Park مؤلف البحث Emad Gamal Barakat Hussein الناشر Proceedings of the 9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT 2023) سنة البحث 2023
