Porous anodic alumina (PAA) templates have been extensively studied due to their unique morphology and extensive applications.The fabrication of PAAcan bemodulated to achieve a self-ordered pore structure with desired pore size and interpore separation.PAAthin film templateswere fabricated fromsilicon doped aluminumfilm,Al-1wt%Si, based on one-step anodization method at 22 °C. Effects of anodizing potential (10–20V) as well as sulfuric acid concentrations (0.6–1.8M) on current density, interpore distance, anodization rate, and volume expansion were evaluated.The results indicated that current density increased largely exponentially with a concentration of the electrolyte at a given anodizing voltage. In addition, distinct andwell-ordered pores were obtained for anodization conducted at 15Vand 20 V. The volume expansion factor is proportional to the applied voltage. At 1.8Msulfuric acid, the expansion factor increases with pore regularity with 1.4 considered as the transition point.Theminimumcurrent density (2.1±0.15mAcm−2) was observed at theminimumanodizing condition (0.6M, 10V).Also,maximumanodizing condition (1.8M, 20V) resulted in the highest current density of 34±4mAcm−2.As expected, anodization time decreaseswith an increase in both anodization voltage and electrolyte concentration.