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Electrode configurations for layered-plate piezoelectric micro-actuators

Research Abstract
NULL
Research Authors
Cuong H. Nguyen, Mahmoud A. Farghaly, Muhammad N. Akram, Ulrik Hanke, Einar Halvorsen
Research Department
Research Journal
Microelectronic Engineering
Research Pages
59-63
Research Publisher
Elsevier
Research Rank
1
Research Vol
174
Research Website
https://www.sciencedirect.com/science/article/pii/S0167931717300321
Research Year
2017